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N. Dirkx

Publications and source records attributed to N. Dirkx.

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Sparse add-on controller design: A Youla approach to system-level performance

The performance of high-tech systems is often dictated by a few performance objectives shared among the many closed-loop controlled subsystems operating in the machine, such as synchronization, coordination, and alignment, which necessitates control methods that explicitly address them to achieve optimal performance. The aim of this paper is to introduce a framework that improves system performance through system-level controllers designed to be implemented as add-ons to the existing subsystem control structure. The developed method parametrizes all stabilizing system-level add-on controllers using the Youla framework, enabling a convex formulation of the sparse $\mathcal{H}_2$ synthesis problem. The result is a sparse add-on controller that achieves the optimal trade-off between combined performance and interconnection complexity, as demonstrated through numerical simulations.

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Frequency domain identification for multivariable motion control systems: Applied to a prototype wafer stage

Multivariable parametric models are essential for optimizing the performance of high-tech systems. The main objective of this paper is to develop an identification strategy that provides accurate parametric models for complex multivariable systems. To achieve this, an additive model structure is adopted, offering advantages over traditional black-box model structures when considering physical systems. The introduced method minimizes a weighted least-squares criterion and uses an iterative linear regression algorithm to solve the estimation problem, achieving local optimality upon convergence. Experimental validation is conducted on a prototype wafer-stage system, featuring a large number of spatially distributed actuators and sensors and exhibiting complex flexible dynamic behavior, to evaluate performance and demonstrate the effectiveness of the proposed method.

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