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Nils J. Engelsen

Publications and source records attributed to Nils J. Engelsen.

16 recordsLinked to original sources

On-Chip Frequency Noise Cancellation in Nanomechanical Resonators using Cavity Optomechanics

Understanding and minimizing the sources of frequency noise in nanomechanical resonators is crucial for many sensing applications. In this work, we report an ultracoherent perimeter-mode nanomechanical resonator co-integrated with an on-chip optical cavity. This device combines low thermomechanical force noise and low detector noise, allowing us to study its intrinsic frequency fluctuations in detail. We find that the fluctuations of two mechanical modes are strongly correlated. Moreover, we demonstrate the generation of a signal at the frequency difference between the two modes directly on chip via nonlinear optomechanical transduction. This `difference signal' has vastly reduced intrinsic frequency fluctuations and can be used for frequency tracking with high precision, as we establish in a proof-of-principle experiment.

physics.optics

Noncontact friction in ultracoherent nanomechanical resonators near dielectric materials

Micro- and nanomechanical resonators are emerging as promising platforms for quantum technologies, precision sensors and fundamental science experiments. To utilize these devices for force sensing or quantum optomechanics, they must be brought in close proximity with other systems for functionalization or efficient readout. Improved understanding of the loss mechanisms in nanomechanical resonators, specifically the advent of dissipation dilution, has led to the development of resonators with unprecedented coherence properties. The mechanical quality factors of this new class of ultracoherent micro- and nanomechanical oscillators can now exceed 1 billion at room temperature, setting their force sensitivities below 1 $\mathrm{aN}/\sqrt{\mathrm{Hz}}$, surpassing those of the state-of-the-art atomic force microscopes (AFMs). Given this new regime of sensitivity, an intriguing question is whether the proximity of other materials hinders mechanical coherence. Here we show: it does. We report a novel dissipation mechanism that occurs in ultracoherent nanomechanical oscillators caused by the presence of nearby dielectrics. By studying the parameter scaling of the effect, we show that the mechanism is more severe for low-frequency mechanical modes and that it is due to dielectric loss within the materials caused by the motion of a resonator which carries static charges. Our observations are consistent with the noncontact friction (NCF) observed in AFMs. Our findings provide insights into limitations on the integration of ultracoherent nanomechanical resonators and highlight the adverse effects of charged defects in these systems.

cond-mat.mes-hall

Motional sideband asymmetry of a solid-state mechanical resonator at room temperature

The motional sideband asymmetry of a mechanical oscillator interacting with a laser field can be observed when approaching the quantum ground state, where the zero-point energy of the mechanical oscillator becomes a sizable contribution to its motion. In the context of quantum optomechanics, it allows, in principle, calibration-free inference of the thermal equilibrium of a macroscopic mechanical resonator with its optical bath. At room temperature, this phenomenon has been observed in pioneering experiments using levitated nanoparticles. Measuring this effect with solid-state mechanical resonators has been compounded by thermal intermodulation noise, mirror frequency noise and low quantum cooperativity. Here, we sideband-cool a membrane-in-the-middle system close to the quantum ground state from room temperature, and observe motional sideband asymmetry in a dual-homodyne measurement. Sideband thermometry yields a minimum phonon occupancy of $\bar{n}_{eff}=9.5$. Our work provides insights into nonlinear optomechanical dynamics at room temperature and facilitates accessible optomechanical quantum technologies without the need for complex feedback control and cryogenic cooling.

quant-ph

Room-temperature quantum optomechanics using an ultra-low noise cavity

Ponderomotive squeezing of light, where a mechanical oscillator creates quantum correlations between the phase and amplitude of the interacting light field, is a canonical signature of the quantum regime of optomechanics. At room temperature, this has only been reached in pioneering experiments where an optical restoring force controls the oscillator stiffness, akin to the vibrational motion of atoms in an optical lattice. These include both levitated nanoparticles and optically-trapped cantilevers. Recent advances in engineered mechanical resonators, where the restoring force is provided by material rigidity rather than an external optical potential, have realized ultra-high quality factors (Q) by exploiting `soft clamping'. However entering the quantum regime with such resonators, has so far been prevented by optical cavity frequency fluctuations and thermal intermodulation noise. Here, we overcome this challenge and demonstrate optomechanical squeezing at room temperature in a phononic-engineered membrane-in-the-middle system. By using a high finesse cavity whose mirrors are patterned with phononic crystal structures, we reduce cavity frequency noise by more than 700-fold. In this ultra-low noise cavity, we introduce a silicon nitride membrane oscillator whose density is modulated by silicon nano-pillars, yielding both high thermal conductance and a localized mechanical mode with Q of 1.8e8. These advances enable operation within a factor of 2.5 of the Heisenberg limit, leading to squeezing of the probing field by 1.09 dB below the vacuum fluctuations. Moreover, the long thermal decoherence time of the membrane oscillator (more than 30 vibrational periods) allows us to obtain conditional displaced thermal states of motion with an occupation of 0.97 phonon, using a multimode Kalman filter. Our work extends quantum control of engineered macroscopic oscillators to room temperature.

quant-ph

Quantum state heralding using photonic integrated circuits with free electrons

Recently, integrated photonic circuits have brought new capabilities to electron microscopy and been used to demonstrate efficient electron phase modulation and electron-photon correlations. Here, we quantitatively analyze the feasibility of high fidelity and high purity quantum state heralding using a free electron and a photonic integrated circuit with parametric coupling, and propose schemes to shape useful electron and photonic states in different application scenarios. Adopting a dissipative quantum electrodynamics treatment, we formulate a framework for the coupling of free electrons to waveguide spatial-temporal modes. To avoid multimode-coupling induced state decoherence, we show that with proper waveguide design, the interaction can be reduced to a single-mode coupling to a quasi-TM00 mode. In the single-mode coupling limit, we go beyond the conventional state ladder treatment, and show that the electron-photon energy correlations within the ladder subspace can still lead to a fundamental purity and fidelity limit on complex optical and electron state preparations through heralding schemes. We propose applications that use this underlying correlation to their advantage, but also show that the imposed limitations for general applications can be overcome by using photonic integrated circuits with an experimentally feasible interaction length, showing its promise as a platform for free-electron quantum optics.

quant-ph

Hierarchical tensile structures with ultralow mechanical dissipation

Structural hierarchy is found in myriad biological systems and has improved man-made structures ranging from the Eiffel tower to optical cavities. Hierarchical metamaterials utilize structure at multiple size scales to realize new and highly desirable properties which can be strikingly different from those of the constituent materials. In mechanical resonators whose rigidity is provided by static tension, structural hierarchy can reduce the dissipation of the fundamental mode to ultralow levels due to an unconventional form of soft clamping. Here, we apply hierarchical design to silicon nitride nanomechanical resonators and realize binary tree-shaped resonators with quality factors as high as $10^9$ at 107 kHz frequency, reaching the parameter regime of levitated particles. The resonators' thermal-noise-limited force sensitivities reach $740\ \mathrm{zN/\sqrt{Hz}}$ at room temperature and $\mathrm{90\ zN/\sqrt{Hz}}$ at 6 K, surpassing state-of-the-art cantilevers currently used for force microscopy. We also find that the self-similar structure of binary tree resonators results in fractional spectral dimensions, which is characteristic of fractal geometries. Moreover, we show that the hierarchical design principles can be extended to 2D trampoline membranes, and we fabricate ultralow dissipation membranes suitable for interferometric position measurements in Fabry-Pérot cavities. Hierarchical nanomechanical resonators open new avenues in force sensing, signal transduction and quantum optomechanics, where low dissipation is paramount and operation with the fundamental mode is often advantageous.

cond-mat.mes-hall

Nanomechanical resonators with ultra-high-$Q$ perimeter modes

Systems with low mechanical dissipation are extensively used in precision measurements such as gravitational wave detection, atomic force microscopy and quantum control of mechanical oscillators via opto- and electromechanics. The mechanical quality factor ($Q$) of these systems determines the thermomechanical force noise and the thermal decoherence rate of mechanical quantum states. While the dissipation rate is typically set by the bulk acoustic properties of the material, by exploiting dissipation dilution, mechanical $Q$ can be engineered through geometry and increased by many orders of magnitude. Recently, soft clamping in combination with strain engineering has enabled room temperature quality factors approaching one billion ($10^9$) in millimeter-scale resonators. Here we demonstrate a new approach to soft clamping which exploits vibrations in the perimeter of polygon-shaped resonators tethered at their vertices. In contrast to previous approaches, which rely on cascaded elements to achieve soft clamping, perimeter modes are soft clamped due to symmetry and the boundary conditions at the polygon vertices. Perimeter modes reach $Q$ of 3.6 billion at room temperature while spanning only two acoustic wavelengths -- a 4-fold improvement over the state-of-the-art mechanical $Q$ with 10-fold smaller devices. The small size of our devices makes them well-suited for near-field integration with microcavities for quantum optomechanical experiments. Moreover, their compactness allows the realization of phononic lattices. We demonstrate a one-dimensional Su-Schrieffer-Heeger chain of high-$Q$ perimeter modes coupled via nearest-neighbour interaction and characterize the localized edge modes.

physics.app-ph

Strained crystalline nanomechanical resonators with ultralow dissipation

In strained mechanical resonators, the concurrence of tensile stress and geometric nonlinearity dramatically reduces dissipation. This phenomenon, dissipation dilution, is employed in mirror suspensions of gravitational wave interferometers and at the nanoscale, where soft-clamping and strain engineering have allowed extremely high quality factors. However, these techniques have so far only been applied in amorphous materials, specifically silicon nitride. Crystalline materials exhibit significantly lower intrinsic damping at cryogenic temperatures, due to the absence of two level systems in the bulk, as exploited in Weber bars and silicon optomechanical cavities. Applying dissipation dilution engineering to strained crystalline materials could therefore enable extremely low loss nanomechanical resonators, due to the combination of reduced internal friction, high intrinsic strain, and high yield strength. Pioneering work has not yet fully exploited this potential. Here, we demonstrate that single crystal strained silicon, a material developed for high mobility transistors, can be used to realize mechanical resonators with ultralow dissipation. We observe that high aspect ratio ($>10^5$) strained silicon nanostrings support MHz mechanical modes with quality factors exceeding $10^{10}$ at 7 K, a tenfold improvement over values reported in silicon nitride. At 7 K, the thermal noise-limited force sensitivity is approximately $45\ \mathrm{{zN}/{\sqrt{Hz}}}$ - approaching that of carbon nanotubes - and the heating rate is only 60 quanta-per-second. Our nanomechanical resonators exhibit lower dissipation than the most pristine macroscopic oscillators and their low mass makes them particularly promising for quantum sensing and transduction.

cond-mat.mes-hall

High-yield wafer-scale fabrication of ultralow-loss, dispersion-engineered silicon nitride photonic circuits

Low-loss photonic integrated circuits (PIC) and microresonators have enabled novel applications ranging from narrow-linewidth lasers, microwave photonics, to chip-scale optical frequency combs and quantum frequency conversion. To translate these results into a widespread technology, attaining ultralow optical losses with established foundry manufacturing is critical. Recent advances in fabrication of integrated Si3N4 photonics have shown that ultralow-loss, dispersion-engineered microresonators can be attained at die-level throughput. For emerging nonlinear applications such as integrated travelling-wave parametric amplifiers and mode-locked lasers, PICs of length scales of up to a meter are required, placing stringent demands on yield and performance that have not been met with current fabrication techniques. Here we overcome these challenges and demonstrate a fabrication technology which meets all these requirements on wafer-level yield, performance and length scale. Photonic microresonators with a mean Q factor exceeding 30 million, corresponding to a linear propagation loss of 1.0 dB/m, are obtained over full 4-inch wafers, as determined from a statistical analysis of tens of thousands of optical resonances and cavity ringdown with 19 ns photon storage time. The process operates over large areas with high yield, enabling 1-meter-long spiral waveguides with 2.4 dB/m loss in dies of only 5x5 mm size. Using a modulation response measurement self-calibrated via the Kerr nonlinearity, we reveal that, strikingly, the intrinsic absorption-limited Q factor of our Si3N4 microresonators exceeds a billion. Transferring the present Si3N4 photonics technology to standard commercial foundries, and merging it with silicon photonics using heterogeneous integration technology, will significantly expand the scope of today's integrated photonics and seed new applications.

physics.app-ph

Thermal intermodulation noise in cavity-based measurements

Thermal frequency fluctuations in optical cavities limit the sensitivity of precision experiments ranging from gravitational wave observatories to optical atomic clocks. Conventional modeling of these noises assumes a linear response of the optical field to the fluctuations of cavity frequency. Fundamentally, however, this response is nonlinear. Here we show that nonlinearly transduced thermal fluctuations of cavity frequency can dominate the broadband noise in photodetection, even when the magnitude of fluctuations is much smaller than the cavity linewidth. We term this noise "thermal intermodulation noise" and show that for a resonant laser probe it manifests as intensity fluctuations. We report and characterize thermal intermodulation noise in an optomechanical cavity, where the frequency fluctuations are caused by mechanical Brownian motion, and find excellent agreement with our developed theoretical model. We demonstrate that the effect is particularly relevant to quantum optomechanics: using a phononic crystal $Si_3N_4$ membrane with a low mass, soft-clamped mechanical mode we are able to operate in the regime where measurement quantum backaction contributes as much force noise as the thermal environment does. However, in the presence of intermodulation noise, quantum signatures of measurement are not revealed in direct photodetectors. The reported noise mechanism, while studied for an optomechanical system, can exist in any optical cavity.

physics.optics

Fractal-like mechanical resonators with soft-clamped fundamental mode

Self-similar structures occur naturally and have been employed to engineer exotic physical properties. Here we show that acoustic modes of a fractal-like system of tensioned strings can display increased mechanical quality factors due to the enhancement of dissipation dilution. We describe a realistic resonator design in which the quality factor of the fundamental mode is enhanced by as much as two orders of magnitude compared to a simple string with the same size and tension. Our findings can open new avenues in force sensing, cavity quantum optomechanics and experiments with suspended test masses.

cond-mat.mes-hall

Clamp-tapering increases the quality factor of stressed nanobeams

Stressed nanomechanical resonators are known to have exceptionally high quality factors ($Q$) due to the dilution of intrinsic dissipation by stress. Typically, the amount of dissipation dilution and thus the resonator $Q$ is limited by the high mode curvature region near the clamps. Here we study the effect of clamp geometry on the $Q$ of nanobeams made of high-stress $\mathrm{Si_3N_4}$. We find that tapering the beam near the clamp - and locally increasing the stress - leads to increased $Q$ of MHz-frequency low order modes due to enhanced dissipation dilution. Contrary to recent studies of tethered-membrane resonators, we find that widening the clamps leads to decreased $Q$ despite increased stress in the beam bulk. The tapered-clamping approach has practical advantages compared to the recently developed "soft-clamping" technique. Tapered-clamping enhances the $Q$ of the fundamental mode and can be implemented without increasing the device size.

physics.app-ph

Thermo-refractive noise in silicon nitride microresonators

Thermodynamic noise places a fundamental limit on the frequency stability of dielectric optical resonators. Here, we present the characterization of thermo-refractive noise in photonic-chip-based silicon nitride microresonators and show that thermo-refractive noise is the dominant thermal noise source in the platform. We employed balanced homodyne detection to measure the thermo-refractive noise spectrum of microresonators of different diameters. The measurements are in good agreement with theoretical models and finite element method simulations. Our characterization sets quantitative bounds on the scaling and absolute magnitude of thermal noise in photonic chip-based microresonators. An improved understanding of thermo-refractive noise can prove valuable in the design considerations and performance limitations of future photonic integrated devices.

physics.optics

Ultralow-power chip-based soliton microcombs for photonic integration

The generation of dissipative Kerr solitons in optical microresonators has provided a route to compact frequency combs of high repetition rate, which have already been employed for optical frequency synthesizers, ultrafast ranging, coherent telecommunication and dual-comb spectroscopy. Silicon nitride (Si$_3$N$_4$) microresonators are promising for photonic integrated soliton microcombs. Yet to date, soliton formation in Si$_3$N$_4$ microresonators at electronically detectable repetition rates, typically less than 100 GHz, is hindered by the requirement of external power amplifiers, due to the low quality ($Q$) factors, as well as by thermal effects which necessitate the use of frequency agile lasers to access the soliton state. These requirements complicate future photonic integration, heterogeneous or hybrid, of soliton microcomb devices based on Si$_3$N$_4$ microresonators with other active or passive components. Here, using the photonic Damascene reflow process, we demonstrate ultralow-power single soliton formation in high-Q ($Q_0>15\times10^6$) Si$_3$N$_4$ microresonators with 9.8 mW input power (6.2 mW in the waveguide) for devices of electronically detectable, 99 GHz repetition rate. We show that solitons can be accessed via simple, slow laser piezo tuning, in many resonances in the same sample. These power levels are compatible with current silicon-photonics-based lasers for full photonic integration of soliton microcombs, at repetition rates suitable for applications such as ultrafast ranging and coherent communication. Our results show the technological readiness of Si$_3$N$_4$ optical waveguides for future all-on-chip soliton microcomb devices.

physics.optics

Generalized dissipation dilution in strained mechanical resonators

Mechanical resonators with high quality factors are of relevance in precision experiments, ranging from gravitational wave detection and force sensing to quantum optomechanics. Beams and membranes are well known to exhibit flexural modes with enhanced quality factors when subjected to tensile stress. The mechanism for this enhancement has been a subject of debate, but is typically attributed to elastic energy being "diluted" by a lossless potential. Here we clarify the origin of the lossless potential to be the combination of tension and geometric nonlinearity of strain. We present a general theory of dissipation dilution that is applicable to arbitrary resonator geometries and discuss why this effect is particularly strong for flexural modes of nanomechanical structures with high aspect ratios. Applying the theory to a non-uniform doubly clamped beam, we show analytically how dissipation dilution can be enhanced by modifying the beam shape to implement "soft clamping", thin clamping and geometric strain engineering, and derive the ultimate limit for dissipation dilution.

physics.app-ph

Strain engineering for ultra-coherent nanomechanical oscillators

Elastic strain engineering utilizes stress to realize unusual material properties. For instance, strain can be used to enhance the electron mobility of a semiconductor, enabling more efficient solar cells and smaller, faster transistors. In the context of nanomechanics, the pursuit of resonators with ultra-high coherence has led to intense study of a complementary strain engineering technique, "dissipation dilution", whereby the stiffness of a material is effectively increased without added loss. Dissipation dilution is known to underlie the anomalously high Q factor of Si$_3$N$_4$ nanomechanical resonators, including recently-developed "soft-clamped" resonators; however, the paradigm has to date relied on weak strain produced during material synthesis. By contrast, the use of geometric strain engineering techniques -- capable of producing local stresses near the material yield strength -- remains largely unexplored. Here we show that geometric strain combined with soft-clamping can produce unprecedentedly high Q nanomechanical resonators. Specifically, using a spatially non-uniform phononic crystal pattern, we colocalize the strain and flexural motion of a Si$_3$N$_4$ nanobeam, while increasing the former to near the yield strength. This combined strategy produces string-like modes with room-temperature Q$\times$frequency products approaching $10^{15}$ Hz, an unprecedented value for a mechanical oscillator of any size. The devices we study can have force sensitivities of aN/rtHz, perform hundreds of quantum coherent oscillations at room temperature, and attain Q > 400 million at radio frequencies. These results signal a paradigm shift in the control of nanomechanical dissipation, with impact ranging from precision force microscopy to tests of quantum gravity. Combining the reported approach with crystalline or 2D materials may lead to further improvement, of as yet unknown limitation.

cond-mat.mes-hall