Pratip Ghosh | Searcharxiv

arXiv2026

Quantitative Fabrication-Error Reduction in Optomechanical Crystal using Proximity Error Correction

We demonstrate the use of proximity effect correction (PEC) in electron beam lithography (EBL) to improve the fabrication fidelity of dense photonic crystal structures. Monte Carlo simulations were employed to model electron scattering and determine the proximity function of the resist-substrate system. Based on this, a computational dose-modification scheme was implemented to compensate for nonuniform energy deposition during exposure. In addition, SEM-based image analysis was performed to quantitatively assess structural differences among uniformly exposed, manually dose-modified, and PEC-fabricated devices by comparing extracted geometries with the reference GDS design. The analysis revealed reduced dimensional deviation, improved spatial uniformity, and lower edge roughness in the PEC-corrected structures. These improvements resulted in a significantly enhanced optical quality factor in the fabricated photonic crystal cavities.

physics.optics↗

arXiv2026

Control Over Fano Parameter in Grating and One-Dimensional Photonic Crystal Cavity

Fano resonances are sharp asymmetrical spectral peaks which are now ubiquitous in nanophotonics. The high sensitivity of these resonances to system parameter has been exploited to improve light matter interaction and in applications such as sensing, filters and on-chip processing. The ability to dynamically change the Fano slope and spectral phase would enable optimization of the device parameters post fabrication for various applications. Here we demonstrate such a control over the Fano resonance in a one-dimensional photonics crystal cavity integrated on a silicon waveguide -grating platform. In our device, Fano resonance arises due to interference between cavity mode and an oscillatory background due to grating coupler. The dynamics tuning of Fano asymmetric parameter is achieved using thermos-optic effect in silicon. We experimentally tune the Fano parameter from ~-3.2 to +1.7 achieving a highest extinction ratio of 21.6 dB and spectral slope of 108dB/nm. All the above is achieved in an ultra-compact design with simple fabrication and with multiple cavities or feedback elements. The steep slope offers distinct advantage over conventional cavity for sensing and modulation applications and the tunability enables dynamic control over gain, dynamic range, bandwidth and noise coupling.

physics.optics↗