Ramidin Kamidi | Searcharxiv

arXiv2024

Active Compensation of Position Dependent Flexible Dynamics in High-Precision Mechatronics

Growing demands in the semiconductor industry necessitate increasingly stringent requirements on throughput and positioning accuracy of lithographic equipment. Meeting these demands involves employing highly aggressive motion profiles, which introduce position-dependent flexible dynamics, thus compromising achievable position tracking performance. This paper introduces a control approach enabling active compensation of position-dependent flexible dynamics by extending the conventional rigid-body control structure to include active control of flexible dynamics. To facilitate real-time implementation of the control algorithm, appropriate position-dependent weighting functions are introduced, ensuring computationally efficient execution of the proposed approach. The efficacy of the proposed control design approach is demonstrated through experiments conducted on a state-of-the-art extreme ultraviolet (EUV) wafer stage.

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arXiv2023

Physics-guided neural networks for feedforward control with input-to-state stability guarantees

The increasing demand on precision and throughput within high-precision mechatronics industries requires a new generation of feedforward controllers with higher accuracy than existing, physics-based feedforward controllers. As neural networks are universal approximators, they can in principle yield feedforward controllers with a higher accuracy, but suffer from bad extrapolation outside the training data set, which makes them unsafe for implementation in industry. Motivated by this, we develop a novel physics-guided neural network (PGNN) architecture that structurally merges a physics-based layer and a black-box neural layer in a single model. The parameters of the two layers are simultaneously identified, while a novel regularization cost function is used to prevent competition among layers and to preserve consistency of the physics-based parameters. Moreover, in order to ensure stability of PGNN feedforward controllers, we develop sufficient conditions for analyzing or imposing (during training) input-to-state stability of PGNNs, based on novel, less conservative Lipschitz bounds for neural networks. The developed PGNN feedforward control framework is validated on a real-life, high-precision industrial linear motor used in lithography machines, where it reaches a factor 2 improvement with respect to physics-based mass-friction feedforward and it significantly outperforms alternative neural network based feedforward controllers.

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