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Robbert Voorhoeve

Publications and source records attributed to Robbert Voorhoeve.

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On Frequency Response Function Identification for Advanced Motion Control

A key step in control of precision mechatronic systems is Frequency Response Function (FRF) identification. The aim of this paper is to illustrate relevant developments and solutions for FRF identification for advanced motion control. Specifically dealing with transient and/or closed-loop conditions that can normally lead to inaccurate estimation results. This yields essential insights for FRF identification for advanced motion control that are illustrated through a simulation study and validated on an experimental setup.

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Identifying Position-Dependent Mechanical Systems: A Modal Approach Applied to a Flexible Wafer Stage

Increasingly stringent performance requirements for motion control necessitate the use of increasingly detailed models of the system behavior. Motion systems inherently move, therefore, spatio-temporal models of the flexible dynamics are essential. In this paper, a two-step approach for the identification of the spatio-temporal behavior of mechanical systems is developed and applied to a lightweight prototype industrial wafer stage. The proposed approach exploits a modal modeling framework and combines recently developed powerful linear time invariant (LTI) identification tools with a spline-based mode-shape interpolation approach to estimate the spatial system behavior. The experimental results for the wafer stage application confirm the suitability of the proposed approach for the identification of complex position-dependent mechanical systems, and its potential for motion control performance improvements.

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