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Sander Senhorst

Publications and source records attributed to Sander Senhorst.

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The 2D approximation quickly breaks down in reflection ptychography

Ptychographic reconstructions in reflection geometries are commonly interpreted with the same two-dimensional thin-sample model used in transmission, yet the validity of this approximation has not been established. We develop a three-dimensional weak-scattering description of reflection ptychography and derive explicit thickness criteria for when a two-dimensional model remains accurate. Because the sampled axial spatial frequency range is dominated by the rotation of the Ewald sphere rather than its curvature, reflection geometries impose far stricter thin-sample conditions than transmission geometries. The allowable thickness is reduced by one to two orders of magnitude for a representative extreme ultraviolet geometry, depending on the tolerance for appearance of artifacts. Simulations verify that conventional two-dimensional reconstructions may exhibit the thickness-dependent artifacts as predicted by the theory, with particularly strong distortions near specular Bragg minima. We further show that incorporating the correct depth-dependent propagation into the forward model resolves these distortions and enables recovery of sample thickness. These results establish practical validity limits for two-dimensional reflection ptychography and identify a path toward quantitative depth-sensitive reconstructions at all geometries.

physics.optics

Mitigating tilt-induced artifacts in reflection ptychography via optimization of the tilt angles

Ptychography in a reflection geometry shows great promise for non-destructive imaging of 3-dimensional nanostructures at the surface of a thick substrate. A major challenge to obtain high quality reflection-ptychographic images under near-grazing conditions has been to calibrate the incidence angle used to straighten the measured curved diffraction patterns in a process referred to as 'tilted plane correction' (TPC). In this work, we leverage the flexibility of automatic differentiation (AD)-based modeling to realise an alternative approach, where the tilted propagation is included into the forward model. Use of AD allows us to jointly optimize the tilt angles with the typical probe and object, eliminating the need for accurate calibration or random search optimization. The approach was validated using datasets generated with an extreme ultraviolet (EUV) beamline based on either a tabletop high harmonic generation (HHG) source or a visible laser. We demonstrate that the proposed approach can converge to a precision of $\pm 0.05\deg$ for probe beams at $70\deg$ angle of incidence, possibly precise enough for use as a calibration approach. Furthermore, we demonstrate that optimizing for the tilt angles reduces artifacts and increases reconstruction fidelity. Use of AD not only streamlines the current ptychographic reconstruction process, but should also enable optimization of more complex models in other domains, which will undoubtedly be essential for future advancements in computational imaging.

physics.optics