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Sheng-Nan Liang

Publications and source records attributed to Sheng-Nan Liang.

3 recordsLinked to original sources

Complementary-polarity double-layer LiTaO3 resonators for symmetry-selective SH2 excitation with ultrahigh electromechanical coupling (kt^2 = 25.7%)

We report a structurally simple double-layer lithium tantalate (LiTaO3) bulk acoustic resonator that enables symmetry-selective excitation of the second-order thickness-shear (SH2) mode with ultrahigh electromechanical coupling. Two 31 deg Y-oriented single-crystal LiTaO3 films are rotation-bonded with complementary polarization (+X/-X) and driven by a longitudinal electric field. Matching between the effective piezoelectric symmetry and the SH2 mode yields an effective electromechanical coupling coefficient of kt^2 = 25.7% at 5.24 MHz. To our knowledge, this is the highest kt^2 reported for a LiTaO3 resonator architecture to date. The measured response is dominated by the target SH2 mode, with only weak parasitic features in the operating band. The structure is also tunable: the resonance frequency and coupling can be adjusted through geometric parameters while maintaining stable modal behavior, indicating good process tolerance. Finite-element analysis further suggests straightforward frequency scaling beyond 5 GHz by reducing the film and electrode thickness while preserving approximately 25% kt^2. In addition, introducing a SiO2 compensation layer is predicted to improve the temperature coefficient of frequency to approximately -25 ppm/deg C. These results establish complementary-polarity double-layer LiTaO3 as a practical platform for high-coupling, spurious-suppressed acoustic resonators and provide a scalable route toward wideband ultrasonic resonators, filters, and related transducers.

physics.app-ph

Deployable Nanoelectromechanical Bound States in the Continuum Enabled by GHz Lamb Wave Phononic Crystals on LiNbO3 Thin Films

Bound states in the continuum (BICs) are a fascinating class of eigenstates that trap energy within the continuum, enabling breakthroughs in ultra-low-threshold lasing, high-Q sensing, and advanced wave-matter interactions. However, their stringent symmetry requirements hinder practical integration, especially in acoustic and electromechanical systems where efficient mode excitation is challenging. Here, we demonstrate deployable nanoelectromechanical quasi-BICs on suspended lithium niobate (LiNbO3) thin films, enabled by nanoscale Lamb wave phononic crystals (PnCs) operating at gigahertz frequencies. By exploiting the decoupling of symmetric (S) and antisymmetric (A) Lamb wave modes, we create a robust framework for BICs. Controlled mirror symmetry breaking induces targeted coupling between the S and A modes, resulting in quasi-BICs that preserve high-Q characteristics and can be excited by traveling waves, eliminating the need for specialized excitation schemes. Our approach enables the multiplexing of quasi-BIC resonators along a single transmission line, each corresponding to a unique frequency and spatial position. This work presents a scalable route for the on-chip integration of BICs, bridging the gap between theoretical concepts and practical nanoelectromechanical devices, and opening new avenues in advanced signal processing, high-precision sensing, and quantum acoustics.

physics.app-ph

Double-layer Thin-film LiNbO3 Longitudinally Excited Shear Wave Resonators with Ultra-large Electromechanical Coupling Coefficient and Spurious-Free Performance

This work proposes a double-layer thin-film lithium niobate (LiNbO3) longitudinally excited shear wave resonator with a theoretical electromechanical coupling coefficient exceeding 60%, RaR close to 28%, and no spurious modes. This ultra-large electromechanical coupling coefficient, which is close to the upper limit of LiNbO3, is much larger than all microwave acoustic resonators reported so far. Based on X-cut thin-film LiNbO3, when the film thickness is in the order of hundreds of nanometers, the frequency of the fundamental mode of the resonator can cover 1GHz to10GHz. The resonator design is convenient and flexible. The resonant frequency can be modulated monotonically by changing either the electrode or the thickness of the thin-film LiNbO3 without introducing additional spurious modes. This ideal resonator architecture is also applicable to LiTaO3. With the development of the new generation of mobile communications, this resonator is expected to become a key solution for future high-performance, ultra-wide-bandwidth acoustic filters.

physics.app-ph