arXiv subjects

Stefan Facsko

Publications and source records attributed to Stefan Facsko.

13 recordsLinked to original sources

arXiv2026

Direct Wafer Bonding of Crystal-Ion-Sliced GaP Thin Films for Photonic Applications

Gallium phosphide (GaP) is a promising material platform for integrated photonics because of its high refractive index, broad optical transparency, and strong second-order nonlinear response. Here, we demonstrate GaP-on-insulator thin films fabricated by crystal ion slicing and direct wafer bonding, using fused silica and SiO$_2$/Si/Si thermally oxidized silicon substrates as representative platforms. Unlike GaP thin-film platforms that rely on heteroepitaxial growth or sacrificial-layer release, the presented approach enables the flexible integration of crystalline GaP thin films, independent of both donor and target substrates. Following post-transfer annealing, the films exhibit near-bulk crystalline quality with low residual strain, smooth surfaces suitable for nanophotonic fabrication, and homogeneous bonding interfaces. Furthermore, annealing restores the linear optical dispersion (n and k) approaching that of epitaxially grown GaP with estimated plane wave absorption loss of 0.9 dB/cm at 1550 nm in the telecom C-band. The demonstrated approach establishes a scalable pathway toward high-quality GaP thin-film photonics compatible with versatile heterogeneous integration and back-end-of-line CMOS processing.

physics.optics↗

arXiv2025

Structural and Optical Properties of Crystal Ion Sliced BaTiO$_3$ Thin Films

Barium titanate (BaTiO$_3$) is a compelling material for integrated photonics due to its strong electro-optic and second-order nonlinear properties. Crystal Ion Slicing (CIS) presents a scalable and CMOS-compatible route for fabricating thin BaTiO$_3$ films; however, ion implantation during CIS introduces lattice damage that can degrade structural and optical performance. In this study, we demonstrate that post-slicing thermal annealing effectively restores the structural integrity and optical quality of CIS-processed BaTiO$_3$ flakes. Raman spectroscopy confirms the recovery of crystallinity, while second-harmonic generation (SHG) microscopy reveals systematic reorientation of ferroelectric domains and restoration of the associated second-order nonlinear susceptibility tensor $X^{(2)}$. Notably, SHG signals persist even in regions with weak Raman signatures, indicating that long-range ferroelectric order can survive despite partial lattice disruption. Optical measurements show that the linear dispersion of annealed CIS flakes closely matches that of bulk BaTiO$_3$, validating their suitability for photonic integration. Together, these results qualify CIS - combined with thermal annealing - as a viable and scalable manufacturing strategy for high-quality BaTiO$_3$-on-insulator (BTOI) platforms, enabling advanced integrated photonic devices for modulation, frequency conversion, and quantum optics.

cond-mat.mtrl-sci↗

arXiv2023

An intermediate morphology in the patterning of the crystalline Ge(001) surface induced by ion irradiation

We investigate the morphologies of the Ge(001) surface that are produced by bombardment with a normally incident, broad argon ion beam at sample temperatures above the recrystallization temperature. Two previously-observed kinds of topographies are seen, i.e., patterns consisting of upright and inverted rectangular pyramids, as well as patterns composed of shallow, isotropic basins. In addition, we observe the formation of an unexpected third type of pattern for intermediate values of the temperature, ion energy and ion flux. In this type of intermediate morphology, isolated peaks with rectangular cross sections stand above a landscape of shallow, rounded basins. We also extend past theoretical work to include a second order correction term that comes from the curvature dependence of the sputter yield. For a range of parameter values, the resulting continuum model of the surface dynamics produces patterns that are remarkably similar to the intermediate morphologies we observe in our experiments. The formation of the isolated peaks is the result of a term that is not ordinarily included in the equation of motion, a second order correction to the curvature dependence of the sputter yield.

cond-mat.mtrl-sci↗

arXiv2020

Measurement of Ehrlich-Schwoebel barrier contribution to the self-organized formation of ordered surface patterns on Ge(001)

Normal incidence 1 keV Ar$^+$ ion bombardment leads to amorphization and ultrasmoothing of Ge at room temperature, but at elevated temperatures the Ge surface remains crystalline and is unstable to the formation of self-organized nanoscale patterns of ordered pyramid-shaped pits. The physical phenomenon distinguishing the high temperature patterning from room temperature ultrasmoothing is believed to be a surface instability due to the Ehrlich-Schwoebel barrier for diffusing vacancies and adatoms, which is not present on the amorphous material. This real-time GISAXS study compares smoothing of a pre-patterned Ge sample at room temperature with patterning of an initially flat Ge sample at an elevated temperature. In both experiments, when the nanoscale structures are relatively small in height, the average kinetics can be explained by a linear theory. The linear theory coefficients, indicating surface stability or instability, were extracted for both experiments. A comparison between the two measurements allows estimation of the contribution of the Ehrlich-Schwoebel barrier to the self-organized formation of ordered nanoscale patterns on crystalline Ge surfaces.

cond-mat.mtrl-sci↗

arXiv2019

Site-controlled formation of single Si nanocrystals in a buried SiO2 matrix using ion beam mixing

For future nanoelectronic devices - such as room-temperature single electron transistors - the site-controlled formation of single Si nanocrystals (NCs) is a crucial prerequisite. Here, we report an approach to fabricate single Si NCs via medium-energy Si+ or Ne+ ion beam mixing of Si into a buried SiO2 layer followed by thermally activated phase separation. Binary collision approximation and kinetic Monte Carlo methods are conducted to gain atomistic insight into the influence of relevant experimental parameters on the Si NC formation process. Energy-filtered transmission electron microscopy is performed to obtain quantitative values on the Si NC size and distribution in dependence of the layer stack geometry, ion fluence and thermal budget. Employing a focused Ne+ beam from a helium ion microscope, we demonstrate site-controlled self-assembly of single Si NCs. Line irradiation with a fluence of 3000 Ne+/nm2 and a line width of 4 nm leads to the formation of a chain of Si NCs, and a single NC with 2.2 nm diameter is subsequently isolated and visualized in a few nanometer thin lamella prepared by a focused ion beam (FIB). The Si NC is centered between the SiO2 layers and perpendicular to the incident Ne+ beam.

cond-mat.mes-hall↗

arXiv2018

Nematicity of correlated systems driven by anisotropic chemical phase separation

The origin of nematicity, i.e., in-plane rotational symmetry breaking, and in particular the relative role played by spontaneous unidirectional ordering of spin, orbital, or charge degrees of freedom, is a challenging issue of magnetism, unconventional superconductivity, and quantum Hall effect systems, discussed in the context of doped semiconductor systems, such as Ga$_{1-x}$Mn$_x$As, Cu$_x$Bi$_2$Se$_3$, and Ga(Al)As/Al$_x$Ga$_{1-x}$As quantum wells, respectively. Here, guided by our experimental and theoretical results for In$_{1-x}$Fe$_x$As, we demonstrate that spinodal phase separation at the growth surface (that has a lower symmetry than the bulk) can lead to a quenched nematic order of alloy components, which then governs low temperature magnetic and magnetotransport properties, in particular the magnetoresistance anisotropy whose theory for the $C_{2v}$ symmetry group is advanced here. These findings, together with earlier data for Ga$_{1-x}$Mn$_x$As, show under which conditions anisotropic chemical phase separation accounts for the magnitude of transition temperature to a collective phase or merely breaks its rotational symmetry. We address the question to what extent the directional distribution of impurities or alloy components setting in during the growth may account for the observed nematicity in other classes of correlated systems.

cond-mat.mtrl-sci↗

arXiv2018

Implanting germanium into graphene

Incorporating heteroatoms into the graphene lattice may be used to tailor its electronic, mechanical and chemical properties. Direct substitutions have thus far been limited to incidental Si impurities and P, N and B dopants introduced using low-energy ion implantation. We present here the heaviest impurity to date, namely $^{74}$Ge$^+$ ions implanted into monolayer graphene. Although sample contamination remains an issue, atomic resolution scanning transmission electron microscopy imaging and quantitative image simulations show that Ge can either directly substitute single atoms, bonding to three carbon neighbors in a buckled out-of-plane configuration, or occupy an in-plane position in a divacancy. First principles molecular dynamics provides further atomistic insight into the implantation process, revealing a strong chemical effect that enables implantation below the graphene displacement threshold energy. Our results show that heavy atoms can be implanted into the graphene lattice, pointing a way towards advanced applications such as single-atom catalysis with graphene as the template.

cond-mat.mtrl-sci↗

arXiv2016

Nano patterns self-aligned to Ga dimer rows on GaAs surfaces

Ion beam irradiation of semiconductors is a method to produce regular periodic nanoscale patterns self-organized on wafer scale. At low temperatures, the surface of semiconductors is typically amorphized by the ion beam. Above a material dependent dynamic recrystallization temperature however, the surface remains crystalline and ion beam irradiation produces regular arrays of faceted ripples on III-V semiconductors. This provides a powerful single-step technique for the production of nanostructures on a large area. On $(001)$ surfaces these ripples are parallel to the $[1\bar{1}0]$ direction without any external anisotropy. The origin of this self-alignment was not fully understood until now. A simple experiment exposing the front side and back side of a GaAs$(001)$ wafer to the ion beam clarifies its origin and proves that the ripples align to the Ga dimer rows. As the direction of Ga dimer rows rotates by 90° on the back side, the orientation of the ripples also rotates by 90° to $[110]$. We discuss the experimental results in view of a model where the pattern formation is driven by creation of vacancies and ad-atoms by the ion beam and their diffusion, which is linked to the direction of dimers on the surface.

cond-mat.mes-hall↗

arXiv2015

Nanometer scale elemental analysis in the helium ion microscope using time of flight spectrometry

Time of flight backscattering spectrometry (ToF-BS) was successfully implemented in a helium ion microscope (HIM). Its integration introduces the ability to perform laterally resolved elemental analysis as well as elemental depth profiling on the nm scale. A lateral resolution of $\leq$ 54 nm and a time resolution of $Δt \leq$ 17 ns $(Δt/t \leq 5.4\%)$ are achieved. By using the energy of the backscattered particles for contrast generation, we introduce a new imaging method to the HIM allowing direct elemental mapping as well as local spectrometry. In addition laterally resolved time of flight secondary ion mass spectrometry (ToF-SIMS) can be performed with the same setup. Time of flight is implemented by pulsing the primary ion beam. This is achieved in a cost effective and minimal invasive way that does not influence the high resolution capabilities of the microscope when operating in standard secondary electron (SE) imaging mode. This technique can thus be easily adapted to existing devices. The particular implementation of ToF-BS and ToF-SIMS techniques are described, results are presented and advantages, difficulties and limitations of this new techniques are discussed.

physics.ins-det↗

arXiv2014

Charge Exchange and Energy Loss of Slow Highly Charged Ions in 1nm Thick Carbon Nanomembranes

Experimental charge exchange and energy loss data for the transmission of slow highly charged Xe ions through ultra-thin polymeric carbon membranes are presented. Surprisingly, two distinct exit charge state distributions accompanied by charge exchange dependent energy losses are observed. The energy loss for ions exhibiting large charge loss shows a quadratic dependency on the incident charge state indicating that equilibrium stopping force values do not apply in this case. Additional angle resolved transmission measurements point on a significant contribution of elastic energy loss. The observations show that regimes of different impact parameters can be separated and thus a particle's energy deposition in an ultra-thin solid target may not be described in terms of an averaged energy loss per unit length.

cond-mat.mtrl-sci↗

arXiv2013

Reverse epitaxy of Ge: ordered and facetted surface patterns

Normal incidence ion irradiation at elevated temperatures, when amorphization is prevented, induces novel nanoscale patterns of crystalline structures on elemental semiconductors by a reverse epitaxial growth mechanism: on Ge surfaces irradiation at temperatures above the recrystallization temperature of 250°C leads to self-organized patterns of inverse pyramids. Checkerboard patterns with fourfold symmetry evolve on the Ge (100) surface, whereas on the Ge (111) surface, isotropic patterns with a sixfold symmetry emerge. After high fluence irradiations these patterns exhibit well developed facets. A deterministic nonlinear continuum equation accounting for the effective surface currents due to an Ehrlich-Schwoebel barrier for diffusing vacancies reproduces remarkably well our experimental observations.

cond-mat.mes-hall↗

arXiv2012

Dynamic effects induced by renormalization in anisotropic pattern forming systems

The dynamics of patterns in large two-dimensional domains remains a challenge in non-equilibrium phenomena. Often it is addressed through mild extensions of one-dimensional equations. We show that full 2D generalizations of the latter can lead to unexpected dynamical behavior. As an example we consider the anisotropic Kuramoto-Sivashinsky equation, that is a generic model of anisotropic pattern forming systems and has been derived in different instances of thin film dynamics. A rotation of a ripple pattern by $90^{\circ}$ occurs in the system evolution when nonlinearities are strongly suppressed along one direction. This effect originates in non-linear parameter renormalization at different rates in the two system dimensions, showing a dynamical interplay between scale invariance and wavelength selection. Potential experimental realizations of this phenomenon are identified.

cond-mat.stat-mech↗

arXiv2010

Nanopatterning of Si surfaces by normal incident ion erosion: influence of metal incorporation on surface morphology evolution

The morphology evolution of Si (100) surfaces under 1200 eV Ar+ ion bombardment at normal incidence with and without metal incorporation is presented. The formation of nanodot patterns is observed only when the stationary Fe concentration in the surface is above 8x10^14 cm^-2. This is interpreted in terms of an additional surface instability due to non-uniform sputtering in connection with metal enrichment at the nanodots. At low metal concentration smoothing dominates and pattern formation is thus inhibited. The transition from a k^-2 to a k^-4 behavior in the asymptotic power spectral density function supports the conclusion that ballistic smoothing and ion-enhanced viscous flow are the two dominant mechanisms of surface relaxation.

cond-mat.mtrl-sci↗