T. Müller — Page 4

arXiv2004

Multi-Dot Floating-Gates for Nonvolatile Semiconductor Memories - Their Ion Beam Synthesis and Morphology

Scalability and performance of current flash memories can be improved substantially by replacing the floating poly-Si gate by a layer of Si dots. This multi-dot layer can be fabricated CMOS-compatibly in very thin gate oxide by ion beam synthesis (IBS). Here, we present both experimental and theoretical studies on IBS of multi-dot layers consisting of Si nanocrystals (NCs). The NCs are produced by ultra low energy Si ion implantation, which causes a high Si supersaturation in the shallow implantation region. During post-implantation annealing, this supersaturation leads to phase separation of the excess Si from the SiO2. Till now, the study of this phase separation process suffered from the weak Z contrast between Si and SiO2 in Transmission Electron Microscopy (TEM). Here, this imaging problem is resolved by mapping Si plasmon losses with a Scanning Transmission Electron Microscopy equipped with a parallel Electron Energy Loss Spectroscopy system (PEELS-STEM). Additionally, kinetic lattice Monte Carlo simulations of Si phase separation have been performed and compared with the experimental Si plasmon maps. It has been predicted theoretically that the morphology of the multi-dot Si floating-gate changes with increasing ion fluence from isolated, spherical NCs to percolated spinodal Si pattern. These patterns agree remarkably with PEELS-STEM images. However, the predicted fluence for spinodal patterns is lower than the experimental one. Because oxidants of the ambient atmosphere penetrate into the as-implanted SiO2, a substantial fraction of the implanted Si might be lost due to oxidation.

cond-mat.mtrl-sci↗

arXiv1998

Isophot Observations of Comet Hale-Bopp: Initial Data Reduction

Comet Hale-Bopp was observed five times with ISOPHOT, the photometer on board the Infrared Space Observatory (ISO). Each time broadband photometry was performed using 4 different detectors, 5 apertures and, 10 filters covering the range between 3.6 to 175 $μ$m. Calibration measurements using the internal Fine Calibration Source were done together with each individual measurement. Background observations were performed with identical instrument settings at the same positions on the sky several days after the comet observations. The observation strategy and the initial data reduction steps are described in some detail and the resulting in-band power values of the Hale-Bopp observations and their uncertainties are derived. Initial reduction of these measurements was performed in 3 steps: (1) processing of raw data by removing instrumental and energetic particle effects, (2) averaging of the individual signals, and (3) determination of the detector responsivities and their uncertainties. The detector signal is determined by two different methods and the best value is chosen. At the present level of processing uncertainties range from 10% to a factor of 3 for the low power levels at short wavelengths. The in-band power levels at different wavelengths varied over 3 orders of magnitude.

astro-ph↗