arXiv subjects
Publications and source records attributed to V. V. Kazmiruk.
In this paper is considered a matter of the system for wafer defect inspection (WDIS) practical realization. Such systems are on the agenda as the next generation and substitution for light optics and single $e$-beam based WDISs.
The $e$-beam column which is intended on defects inspection is considered. The defects which are to be examined or potentially might be examined at inspection stage are briefly considered. Interrelations between the system parameters is ascertaining and the ways of optimization and the technical requirements to the system in whole are discussed. As a result, we find the optimal combinations of the system parameters for the purpose.