arXiv subjects

Yannick S. Klaß

Publications and source records attributed to Yannick S. Klaß.

4 recordsLinked to original sources

arXiv2026

All-dry processing of 3C-SiC nanomechanical string resonators for extreme aspect ratios and high intrinsic quality factor

Conventional fabrication of suspended nanomechanical resonators typically relies on wet-chemical process steps and critical point drying, which can compromise sample yield and cleanliness. Here, we present an all-dry fabrication process for strongly stressed 3C-SiC nanomechanical string resonators that entirely avoids wet-chemical etching and cleaning. Using a negative-tone electron-beam resist as an etch mask and a three-step reactive-ion etching process for both structuring and release, we achieve high fabrication yield, clean suspended structures, and extreme aspect ratios of 8.500. We perform full mechanical characterization of the resulting doubly-clamped nanostring resonators, and establish a benchmark intrinsic quality factor for dissipation-diluted 3C-SiC of Qintr = 4.200.

cond-mat.mtrl-sci↗

arXiv2024

Effect of Helium Ion Implantation on 3C-SiC Nanomechanical String Resonators

Hybrid quantum devices enable novel functionalities by combining the benefits of different subsystems. Particularly, point defects in nanomechanical resonators made of diamond or silicon carbide (SiC) have been proposed for precise magnetic field sensing and as versatile quantum transducers. However, the realization of a hybrid system may involve tradeoffs in the performance of the constituent subsystems. In a spin-mechanical system, the mechanical properties of the resonator may suffer from the presence of engineered defects in the crystal lattice. This may severely restrict the performance of the resulting device and needs to be carefully explored. Here, we focus on the impact of defects on high Q nanomechanical string resonators made of pre-stressed 3C-SiC grown on Si(111). We use helium ion implantation to create point defects and study their accumulated effect on the mechanical performance. Using Euler-Bernoulli beam theory, we present a method to determine Young's modulus and the pre-stress of the strings. We find that Young's modulus is not modified by implantation. Under implantation doses relevant for single defect or defect ensemble generation, both tensile stress and damping rate also remain unaltered. For higher implantation dose, both exhibit a characteristic change.

cond-mat.mes-hall↗

arXiv2022

Determining Young's modulus via the eigenmode spectrum of a nanomechanical string resonator

We present a method for the in-situ determination of Young's modulus of a nanomechanical string resonator subjected to tensile stress. It relies on measuring a large number of harmonic eigenmodes and allows to access Young's modulus even for the case of a stress-dominated frequency response. We use the proposed framework to obtain the Young's modulus of four different wafer materials, comprising the three different material platforms amorphous silicon nitride, crystalline silicon carbide and crystalline indium gallium phosphide. The resulting values are compared with theoretical and literature values where available, revealing the need to measure Young's modulus on the sample material under investigation for precise device characterization.

physics.app-ph↗

arXiv2021

Universal length dependence of tensile stress in nanomechanical string resonators

We investigate the tensile stress in freely suspended nanomechanical string resonators, and observe a material-independent dependence on the resonator length. We compare strongly stressed sting resonators fabricated from four different material systems based on amorphous silicon nitride, crystalline silicon carbide as well as crystalline indium gallium phosphide. The tensile stress is found to increase by approximately 50% for shorter resonators. We establish a simple elastic model to describe the observed length dependence of the tensile stress. The model accurately describes our experimental data. This opens a perspective for stress-engineering the mechanical quality factor of nanomechanical string resonators.

cond-mat.mes-hall↗