arXiv subjects

Zachary H. Levine

Publications and source records attributed to Zachary H. Levine.

8 recordsLinked to original sources

arXiv2026

Using a 4-megapixel hybrid photon counting detector for fast, lab-based nanoscale x-ray tomography

Hybrid photon counting detectors (HPCDs) have unlocked new capabilities for x-ray-based measurements at synchrotrons around the world in the last 30 years. By leveraging independently optimized sensor and readout layers, they offer high quantum efficiency ($> 80 \%$), ultra-low dark counts, sub-pixel point-spread function, and high count rates ($> 10^{6}$ counts per pixel per second). Furthermore, their small pixel size and large active area endow them with excellent coverage and resolution for both real-space and reciprocal space imaging. Here, we demonstrate that HPCDs are also well-suited for laboratory-based nanoscale x-ray tomography (nano-xCT). We perform nano-xCT on an integrated circuit fabricated at the 130-nm node and produce a 3D reconstruction with 40 times more photons collected 20 times faster than in this group's previous work, for an overall speedup of 800$\times$. We review the technical considerations of using an HPCD for tabletop tomography. We quantify our reconstruction image quality using well-established metrics, including the modulation transfer function (MTF), Fourier shell correlation (FSC), and contrast-to-noise (CNR), to validate our choice of experimental parameters that provide sufficient resolution and imaging speed. Using these metrics, we determine that even under current experimental conditions, 160 nm wiring features are reconstructed at 75-80 nm spatial resolution.

physics.ins-det↗

arXiv2024

Nanoscale Three-Dimensional Imaging of Integrated Circuits using a Scanning Electron Microscope and Transition-Edge Sensor Spectrometer

X-ray nanotomography is a powerful tool for the characterization of nanoscale materials and structures, but is difficult to implement due to competing requirements on X-ray flux and spot size. Due to this constraint, state-of-the-art nanotomography is predominantly performed at large synchrotron facilities. We present a laboratory-scale nanotomography instrument that achieves nanoscale spatial resolution while changing the limitations of conventional tomography tools. The instrument combines the electron beam of a scanning electron microscope (SEM) with the precise, broadband X-ray detection of a superconducting transition-edge sensor (TES) microcalorimeter. The electron beam generates a highly focused X-ray spot in a metal target held micrometers away from the sample of interest, while the TES spectrometer isolates target photons with high signal-to-noise. This combination of a focused X-ray spot, energy-resolved X-ray detection, and unique system geometry enable nanoscale, element-specific X-ray imaging in a compact footprint. The proof-of-concept for this approach to X-ray nanotomography is demonstrated by imaging 160 nm features in three dimensions in 6 layers of a Cu-SiO2 integrated circuit, and a path towards finer resolution and enhanced imaging capabilities is discussed.

physics.ins-det↗

arXiv2022

A tabletop x-ray tomography instrument for nanometer-scale imaging: demonstration of the 1,000-element transition-edge sensor subarray

We report on the 1,000-element transition-edge sensor (TES) x-ray spectrometer implementation of the TOMographic Circuit Analysis Tool (TOMCAT). TOMCAT combines a high spatial resolution scanning electron microscope (SEM) with a highly efficient and pixelated TES spectrometer to reconstruct three-dimensional maps of nanoscale integrated circuits (ICs). A 240-pixel prototype spectrometer was recently used to reconstruct ICs at the 130 nm technology node, but to increase imaging speed to more practical levels, the detector efficiency needs to be improved. For this reason, we are building a spectrometer that will eventually contain 3,000 TES microcalorimeters read out with microwave superconducting quantum interference device (SQUID) multiplexing, and we currently have commissioned a 1,000 TES subarray. This still represents a significant improvement from the 240-pixel system and allows us to begin characterizing the full spectrometer performance. Of the 992 maximimum available readout channels, we have yielded 818 devices, representing the largest number of TES x-ray microcalorimeters simultaneously read out to date. These microcalorimeters have been optimized for pulse speed rather than purely energy resolution, and we measure a FWHM energy resolution of 14 eV at the 8.0 keV Cu K$α$ line.

physics.ins-det↗

arXiv2022

Design of a 3000-pixel transition-edge sensor x-ray spectrometer for microcircuit tomography

Feature sizes in integrated circuits have decreased substantially over time, and it has become increasingly difficult to three-dimensionally image these complex circuits after fabrication. This can be important for process development, defect analysis, and detection of unexpected structures in externally sourced chips, among other applications. Here, we report on a non-destructive, tabletop approach that addresses this imaging problem through x-ray tomography, which we uniquely realize with an instrument that combines a scanning electron microscope (SEM) with a transition-edge sensor (TES) x-ray spectrometer. Our approach uses the highly focused SEM electron beam to generate a small x-ray generation region in a carefully designed target layer that is placed over the sample being tested. With the high collection efficiency and resolving power of a TES spectrometer, we can isolate x-rays generated in the target from background and trace their paths through regions of interest in the sample layers, providing information about the various materials along the x-ray paths through their attenuation functions. We have recently demonstrated our approach using a 240 Mo/Cu bilayer TES prototype instrument on a simplified test sample containing features with sizes of $\sim$1 $μ$m. Currently, we are designing and building a 3000 Mo/Au bilayer TES spectrometer upgrade, which is expected to improve the imaging speed by factor of up to 60 through a combination of increased detector number and detector speed.

physics.ins-det↗

arXiv2022

Photon echoes using atomic frequency combs in Pr:YSO -- experiment and semiclassical theory

Photon echoes in rare-earth-doped crystals are studied to understand the challenges of making broadband quantum memories using the atomic frequency comb (AFC) protocol in systems with hyperfine structure. The hyperfine structure of Pr^{3+} poses an obstacle to this goal because frequencies associated with the hyperfine transitions change the simple picture of modulation at an externally imposed frequency. The current work focuses on the intermediate case where the hyperfine spacing is comparable to the comb spacing, a challenging regime that has recently been considered. Operating in this regime may facilitate storing quantum information over a larger spectral range in such systems. In this work, we prepare broadband AFCs using optical combs with tooth spacings ranging from 1 MHz to 16 MHz in fine steps, and measure transmission spectra and photon echoes for each. We predict the spectra and echoes theoretically using the optical combs as input to either a rate equation code or a density matrix code, which calculates the redistribution of populations. We then use the redistributed populations as input to a semiclassical theory using the frequency-dependent dielectric function. The two sets of predictions each give a good, but different account of the photon echoes.

quant-ph↗

arXiv2022

Linearity Characterization and Uncertainty Quantification of Spectroradiometers via Maximum Likelihood and the Non-parametric Bootstrap

A technique for characterizing and correcting the linearity of radiometric instruments is known by the names the "flux-addition method" and the "combinatorial technique". In this paper, we develop a rigorous uncertainty quantification method for use with this technique and illustrate its use with both synthetic data and experimental data from a "beam conjoiner" instrument. We present a probabilistic model that relates the instrument readout to a set of unknown fluxes via a set of polynomial coefficients. Maximum likelihood estimates (MLEs) of the unknown fluxes and polynomial coefficients are recommended, while a non-parametric bootstrap algorithm enables uncertainty quantification (e.g., it can return standard errors). The synthetic data represent plausible outputs of a radiometric instrument and enable testing and validation of the method. The MLEs for these data are found to be approximately unbiased, and confidence intervals derived from the bootstrap replicates are found to be consistent with their target coverage of 95 %. For the polynomial coefficients, the relative bias was less than 1 % and the observed coverages range from 90 % to 97 %. The experimental data set is used to illustrate how a complete calibration with uncertainties can be achieved using the method plus one well-known flux level. The uncertainty contribution attributable to estimation of the instrument's nonlinear response is less than 0.02 % over most of its range.

stat.AP↗

arXiv2022

Physics-assisted Generative Adversarial Network for X-Ray Tomography

X-ray tomography is capable of imaging the interior of objects in three dimensions non-invasively, with applications in biomedical imaging, materials science, electronic inspection, and other fields. The reconstruction process can be an ill-conditioned inverse problem, requiring regularization to obtain satisfactory results. Recently, deep learning has been adopted for tomographic reconstruction. Unlike iterative algorithms which require a distribution that is known a priori, deep reconstruction networks can learn a prior distribution through sampling the training distributions. In this work, we develop a Physics-assisted Generative Adversarial Network (PGAN), a two-step algorithm for tomographic reconstruction. In contrast to previous efforts, our PGAN utilizes maximum-likelihood estimates derived from the measurements to regularize the reconstruction with both known physics and the learned prior. Compared with methods with less physics assisting in training, PGAN can reduce the photon requirement with limited projection angles to achieve a given error rate. The advantages of using a physics-assisted learned prior in X-ray tomography may further enable low-photon nanoscale imaging.

eess.IV↗

arXiv2021

Advantage of Machine Learning over Maximum Likelihood in Limited-Angle Low-Photon X-Ray Tomography

Limited-angle X-ray tomography reconstruction is an ill-conditioned inverse problem in general. Especially when the projection angles are limited and the measurements are taken in a photon-limited condition, reconstructions from classical algorithms such as filtered backprojection may lose fidelity and acquire artifacts due to the missing-cone problem. To obtain satisfactory reconstruction results, prior assumptions, such as total variation minimization and nonlocal image similarity, are usually incorporated within the reconstruction algorithm. In this work, we introduce deep neural networks to determine and apply a prior distribution in the reconstruction process. Our neural networks learn the prior directly from synthetic training samples. The neural nets thus obtain a prior distribution that is specific to the class of objects we are interested in reconstructing. In particular, we used deep generative models with 3D convolutional layers and 3D attention layers which are trained on 3D synthetic integrated circuit (IC) data from a model dubbed CircuitFaker. We demonstrate that, when the projection angles and photon budgets are limited, the priors from our deep generative models can dramatically improve the IC reconstruction quality on synthetic data compared with maximum likelihood estimation. Training the deep generative models with synthetic IC data from CircuitFaker illustrates the capabilities of the learned prior from machine learning. We expect that if the process were reproduced with experimental data, the advantage of the machine learning would persist. The advantages of machine learning in limited angle X-ray tomography may further enable applications in low-photon nanoscale imaging.

eess.IV↗