Calibration of systematic distortions in quantum emitter localization microscopy for deterministic nanophotonic fabrication
Quantum photonic technologies greatly benefit from quantum light emitters with high brightness, indistinguishability, and reliable polarization characteristics. Achieving optimal performance relies on the accurate localization of emitters and their deterministic integration into tailored photonic structures with nanometer-scale accuracy. Although marker-based photoluminescence imaging techniques can achieve statistical fitting uncertainties below 10 nm, the ultimate integration yield is often limited by uncorrected systematic distortions in custom cryo-optical setups that compromise metrological accuracy. Here, we present an in situ calibration protocol that uses lithographically defined gold nanodisk arrays as references to calibrate optical distortions with a Zernike vector-field model. On held-out validation patterns beyond the calibration dataset, this correction reduces the residual systematic bias to 5.3 nm with a 2D scatter of 24.6 nm across the analyzed field of view. Furthermore, we demonstrate that applying this correction to the deterministic fabrication of circular mesa structures around semiconductor quantum dots reduces the variance in emission polarization by 49%, indicating improved registration accuracy. This calibration strategy offers a practical route to high-yield deterministic integration of quantum emitters into scalable quantum photonic circuits.