@misc{indiciae47beaa0aa1fc, title = {Radio-frequency discharges in Oxygen. Part 1: Modeling}, author = {F. X. Bronold and K. Matyash and D. Tskhakaya and R. Schneider and H. Fehske}, year = {2007}, doi = {10.1088/0022-3727/40/21/018}, url = {https://arxiv.org/abs/0705.0495}, note = {Source identifier: 0705.0495} }