@misc{indiciae26ff60b80b33,
  title = {Set of equations for transient enhanced diffusion in shallow ion-implanted layers},
  author = {O. I. Velichko and Yu. P. Shaman and A. K. Fedotov and A. V. Masanik},
  year = {2007},
  url = {https://arxiv.org/abs/0705.0811},
  note = {Source identifier: 0705.0811}
}