TY  - RPRT
TI  - Set of equations for transient enhanced diffusion in shallow ion-implanted layers
AU  - O. I. Velichko
AU  - Yu. P. Shaman
AU  - A. K. Fedotov
AU  - A. V. Masanik
PY  - 2007
UR  - https://arxiv.org/abs/0705.0811
ID  - 0705.0811
ER  -