@misc{indiciaefbd2115c8672,
  title = {A microfabricated sensor for thin dielectric layers},
  author = {P. Fierlinger and R. DeVoe and B. Flatt and G. Gratta and M. Green and S. Kolkowitz and F. Leport and M. Montero Diez and R. Neilson and K. O'Sullivan and A. Pocar and J. Wodin},
  year = {2008},
  doi = {10.1063/1.2906402},
  url = {https://arxiv.org/abs/0706.0540},
  note = {Source identifier: 0706.0540}
}