@misc{indiciaec70b0b152214,
  title = {Microelectromechanical components in electrical metrology},
  author = {Antti Manninen and Anu Karkkainen and Nadine Pesonen and Aarne Oja and Heikki Seppa},
  year = {2007},
  url = {https://arxiv.org/abs/0707.0637},
  note = {Source identifier: 0707.0637}
}