@misc{indiciaee627c53ff44c,
  title = {Digital resonance tuning of high-Q/Vm silicon photonic crystal nanocavities by atomic layer deposition},
  author = {Xiaodong Yang and Charlton J. Chen and Chad A. Husko and Chee Wei Wong},
  year = {2007},
  doi = {10.1063/1.2800312},
  url = {https://arxiv.org/abs/0707.2412},
  note = {Source identifier: 0707.2412}
}