TY  - RPRT
TI  - Digital resonance tuning of high-Q/Vm silicon photonic crystal nanocavities by atomic layer deposition
AU  - Xiaodong Yang
AU  - Charlton J. Chen
AU  - Chad A. Husko
AU  - Chee Wei Wong
PY  - 2007
DO  - 10.1063/1.2800312
UR  - https://arxiv.org/abs/0707.2412
ID  - 0707.2412
ER  -