@misc{indiciaefbc9e8971c35,
  title = {Chemical nanomachining of silicon by gold-catalyzed oxidation},
  author = {J. T. Robinson and J. A. Liddle and P. G. Evans and O. D. Dubon},
  year = {2007},
  doi = {10.1021/nl070810+},
  url = {https://arxiv.org/abs/0707.3307},
  note = {Source identifier: 0707.3307}
}