TY  - RPRT
TI  - Chemical nanomachining of silicon by gold-catalyzed oxidation
AU  - J. T. Robinson
AU  - J. A. Liddle
AU  - P. G. Evans
AU  - O. D. Dubon
PY  - 2007
DO  - 10.1021/nl070810+
UR  - https://arxiv.org/abs/0707.3307
ID  - 0707.3307
ER  -