@misc{indiciae5858069e1c15,
  title = {Carbon nanotube array vias for interconnect applications},
  author = {J. -H. Ting and C. -C. Chiu and F. -Y. Huang},
  year = {2007},
  url = {https://arxiv.org/abs/0708.1298},
  note = {Source identifier: 0708.1298}
}