@misc{indiciaedaebdb17f07c,
  title = {Phase stability of hafnium oxide and zirconium oxide on silicon substrate},
  author = {Dongwon Shin and Zi-Kui Liu},
  year = {2007},
  doi = {10.1016/j.scriptamat.2007.04.011},
  url = {https://arxiv.org/abs/0708.4356},
  note = {Source identifier: 0708.4356}
}