TY  - RPRT
TI  - Phase stability of hafnium oxide and zirconium oxide on silicon substrate
AU  - Dongwon Shin
AU  - Zi-Kui Liu
PY  - 2007
DO  - 10.1016/j.scriptamat.2007.04.011
UR  - https://arxiv.org/abs/0708.4356
ID  - 0708.4356
ER  -