TY  - RPRT
TI  - Measurement of focusing properties for high numerical aperture optics using an automated submicron beamprofiler
AU  - J. J. Chapman
AU  - B. G. Norton
AU  - E. W. Streed
AU  - D. Kielpinski
PY  - 2007
DO  - 10.1063/1.2991112
UR  - https://arxiv.org/abs/0709.1004
ID  - 0709.1004
ER  -