@misc{indiciae00311f6fedaf,
  title = {BCB Based Packaging for Low Actuation Voltage RF MEMS Devices},
  author = {David Peyrou and Fabienne Pennec and Hikmat Achkar and Patrick Pons and Fabio Coccetti and Hervé Aubert and Robert Plana},
  year = {2007},
  doi = {10.1557/proc-0969-w05-06},
  url = {https://arxiv.org/abs/0709.3022},
  note = {Source identifier: 0709.3022}
}