@misc{indiciaebd5959f02a2d,
  title = {Electromagnetic Field Simulations of Isolated and Periodic 3D Photomask Patterns},
  author = {S. Burger and L. Zschiedrich and F. Schmidt and R. Köhle and B. Küchler and C. Nölscher},
  year = {2007},
  doi = {10.1117/12.746392},
  url = {https://arxiv.org/abs/0709.3934},
  note = {Source identifier: 0709.3934}
}