@misc{indiciaee16857151723,
  title = {Microdeflectometry - a novel tool to acquire 3D microtopography with nanometer height resolution},
  author = {Gerd Häusler and Claus Richter and Karl-Heinz Leitz and Markus C. Knauer},
  year = {2008},
  doi = {10.1364/ol.33.000396},
  url = {https://arxiv.org/abs/0710.4505},
  note = {Source identifier: 0710.4505}
}