TY  - RPRT
TI  - Microdeflectometry - a novel tool to acquire 3D microtopography with nanometer height resolution
AU  - Gerd Häusler
AU  - Claus Richter
AU  - Karl-Heinz Leitz
AU  - Markus C. Knauer
PY  - 2008
DO  - 10.1364/ol.33.000396
UR  - https://arxiv.org/abs/0710.4505
ID  - 0710.4505
ER  -