@misc{indiciae98e21f6b7d68,
  title = {Cantilever-Based Biosensors in CMOS Technology},
  author = {K. -U. Kirstein and Y. Li and M. Zimmermann and C. Vancura and T. Volden and W. H. Song and J. Lichtenberg and A. Hierlemannn},
  year = {2007},
  url = {https://arxiv.org/abs/0710.4692},
  note = {Source identifier: 0710.4692}
}