@misc{indiciae450826d5ab05,
  title = {High quality mechanical and optical properties of commercial silicon nitride membranes},
  author = {B. M. Zwickl and W. E. Shanks and A. M. Jayich and C. Yang and A. C. Bleszynski Jayich and J. D. Thompson and J. G. E. Harris},
  year = {2007},
  doi = {10.1063/1.2884191},
  url = {https://arxiv.org/abs/0711.2263},
  note = {Source identifier: 0711.2263}
}