@misc{indiciaef77a31036148,
  title = {Surface Conditioning Effect on Vacuum Microelectronics Components Fabricated by Deep Reactive Ion Etching},
  author = {A. Phommahaxay and G. Lissorgues and L. Rousseau and T. Bourouina and P. Nicole},
  year = {2007},
  url = {https://arxiv.org/abs/0711.3276},
  note = {Source identifier: 0711.3276}
}