TY  - RPRT
TI  - Surface Conditioning Effect on Vacuum Microelectronics Components Fabricated by Deep Reactive Ion Etching
AU  - A. Phommahaxay
AU  - G. Lissorgues
AU  - L. Rousseau
AU  - T. Bourouina
AU  - P. Nicole
PY  - 2007
UR  - https://arxiv.org/abs/0711.3276
ID  - 0711.3276
ER  -