@misc{indiciae03d6c7f331dd,
  title = {3-D Self-Assembled Soi Mems: An Example of Multiphysics Simulation},
  author = {C. Mendez and C. Louis and S. Paquay and P. De Vincenzo and I. Klapka and V. Rochus and F. Iker and Nicolas André and J. -P. Raskin},
  year = {2007},
  url = {https://arxiv.org/abs/0711.3277},
  note = {Source identifier: 0711.3277}
}