@misc{indiciae2ed4e1f9dba3,
  title = {Parametric Yield Analysis of Mems via Statistical Methods},
  author = {S. -P. Vudathu and K. -K. Duganapalli and Rainer Laur and D. Kubalinska and A. Bunse-Gerstner},
  year = {2007},
  url = {https://arxiv.org/abs/0711.3287},
  note = {Source identifier: 0711.3287}
}