TY  - RPRT
TI  - Electrostatically-Driven Resonator on Soi with Improved Temperature Stability
AU  - A. Giridhar
AU  - F. Verjus
AU  - F. Marty
AU  - A. Bosseboeuf
AU  - T. Bourouina
PY  - 2007
UR  - https://arxiv.org/abs/0711.3288
ID  - 0711.3288
ER  -