@misc{indiciae47368cd38f80,
  title = {Electromechanical Reliability Testing of Three-Axial Silicon Force Sensors},
  author = {S. Spinner and J. Bartholomeyczik and B. Becker and M. Doelle and O. Paul and I. Polian and R. Roth and K. Seitz and P. Ruther},
  year = {2007},
  url = {https://arxiv.org/abs/0711.3289},
  note = {Source identifier: 0711.3289}
}