TY - RPRT TI - Design and Development of Novel Electroplating Spring Frame Mems Structure Specimens for the Microtensile Testing of Thin Film Materials AU - Ming-Tzer Lin AU - Chi-Jia Tong AU - Chung-Hsun Chiang PY - 2007 UR - https://arxiv.org/abs/0711.3300 ID - 0711.3300 ER -