@misc{indiciae0b8a146b9f57,
  title = {Characterisation of the Etching Quality in Micro-Electro-Mechanical Systems by Thermal Transient Methodology},
  author = {P. Szabo and B. Nemeth and M. Rencz and B. Courtois},
  year = {2007},
  url = {https://arxiv.org/abs/0711.3301},
  note = {Source identifier: 0711.3301}
}