TY  - RPRT
TI  - Characterisation of the Etching Quality in Micro-Electro-Mechanical Systems by Thermal Transient Methodology
AU  - P. Szabo
AU  - B. Nemeth
AU  - M. Rencz
AU  - B. Courtois
PY  - 2007
UR  - https://arxiv.org/abs/0711.3301
ID  - 0711.3301
ER  -