@misc{indiciae2ca001f5b707,
  title = {Measurement Technique for Elastic and Mechanical Properties of Polycrystalline Silicon-Germanium Films Using Surface Acoustic Waves and Projection Masks},
  author = {A. Bennis and C. Leinenbach and C. Raudzis and R. Müller-Fiedler and S. Kronmüller},
  year = {2007},
  url = {https://arxiv.org/abs/0711.3305},
  note = {Source identifier: 0711.3305}
}