TY  - RPRT
TI  - Measurement Technique for Elastic and Mechanical Properties of Polycrystalline Silicon-Germanium Films Using Surface Acoustic Waves and Projection Masks
AU  - A. Bennis
AU  - C. Leinenbach
AU  - C. Raudzis
AU  - R. Müller-Fiedler
AU  - S. Kronmüller
PY  - 2007
UR  - https://arxiv.org/abs/0711.3305
ID  - 0711.3305
ER  -