@misc{indiciaec4f124dc921f, title = {Design and Fabrication of a Micro Electrostatic Vibration-to-Electricity Energy Converter}, author = {Yi Chiu and Chiung-Ting Kuo and Yu-Shan Chu}, year = {2007}, url = {https://arxiv.org/abs/0711.3313}, note = {Source identifier: 0711.3313} }