@misc{indiciae61151aa75ffa,
  title = {A Generic Surface Micromachining Module for Mems Hermetic Packaging at Temperatures Below 200 degrees C},
  author = {R. Hellin-Rico and J. -P. Celis and K. Baert and C. Van Hoof and A. Witvrouw},
  year = {2007},
  url = {https://arxiv.org/abs/0711.3317},
  note = {Source identifier: 0711.3317}
}