@misc{indiciae38884d37364f,
  title = {Model of Electrostatic Actuated Deformable Mirror Using Strongly Coupled Electro-Mechanical Finite Element},
  author = {V. Rochus and J. -C. Golinval and C. Louis and C. Mendez and I. Klapka},
  year = {2007},
  url = {https://arxiv.org/abs/0711.3331},
  note = {Source identifier: 0711.3331}
}