TY  - RPRT
TI  - Model of Electrostatic Actuated Deformable Mirror Using Strongly Coupled Electro-Mechanical Finite Element
AU  - V. Rochus
AU  - J. -C. Golinval
AU  - C. Louis
AU  - C. Mendez
AU  - I. Klapka
PY  - 2007
UR  - https://arxiv.org/abs/0711.3331
ID  - 0711.3331
ER  -