@misc{indiciaeffce16ba3170,
  title = {New Internal Stress Driven on-Chip Micromachines for Extracting Mechanical Properties of Thin Films},
  author = {D. Fabrègue and Nicolas André and T. Pardoen and J. P. Raskin},
  year = {2007},
  url = {https://arxiv.org/abs/0711.3332},
  note = {Source identifier: 0711.3332}
}