TY  - RPRT
TI  - A New Model of Fringing Capacitance and its Application to the Control of Parallel-Plate Electrostatic Micro Actuators
AU  - M. Hosseini
AU  - G. Zhu
AU  - Y. -A. Peter
PY  - 2007
UR  - https://arxiv.org/abs/0711.3335
ID  - 0711.3335
ER  -