@misc{indiciaeb66d67ed7542,
  title = {Comparative study of the growth of sputtered aluminum oxide films on organic and inorganic substrates},
  author = {Stefan Sellner and Alexander Gerlach and Stefan Kowarik and Frank Schreiber and Helmut Dosch and Stephan Meyer and Jens Pflaum and Gerhard Ulbricht},
  year = {2007},
  doi = {10.1016/j.tsf.2007.12.151},
  url = {https://arxiv.org/abs/0711.5019},
  note = {Source identifier: 0711.5019}
}